micro lens fabrication

  • Wafer-scale micro-optics fabrication

    Wafer-scale micro-optics fabrication 137 Figure 6 Schematic drawing of (left) plan view and (right) cross-sectional view of the resulting resist structure manufactured by pho-tolithography on germanium as described in US patent 2,890,395 fi led by Jay W. Lathrop and James Nall in 1957 [12] .

  • OSA | Micro lens fabrication by means of femtosecond two ...

    We report the fabrication of micro lens using an alternative annular scanning mode with continuous variable layer thickness by two-photon polymerization after -parameter optimization. Laser scanning mode and scanning pace parameter are optimized to achieve good appearance. As examples of the results, a 2 × 2 micro spherical lens array with diameter of 15 μm and a micro Fresnel lens with ...